Equipments
Device characterization
- 4 Optical benches
- 2 Electromagnets
- Source Measure Unit
- 3 Wavelength tunable lasers
- 3 Optical Power meters
- 3 Lock-in Amplifiers
- Optical Spectrum Analyzer
- Digital Sampling Oscilloscope
Packaging, Microscope
- Wire bonder
- High-precision scriber
- Optical microscopes
Fabrication
- Electron-beam evaporator
for Ferromagnetic / nonmagnetc metal, passivation materials - Reactive Ion Etching
for optical waveguides - 2 Shared cleanroom
Photolithograpy, Electron-beam lithograpy, Magnetron Sputtering, Chemical drafts, Scanning Electron Microscope, X-ray Diffractometer
